ALD process has been applied for various fields, including semiconductor, compound semiconductor, MEMS/NEM, optical thin film, laser thin film, coating, corrosion prevention, renewable energy such as solar cell etc., medical device, biomaterial, moisture protection barrier, coating of accessory, over-coating for glass etc.
Following this trend, high-quality purified JAC’s precursors are also used in various applications.
Based on a long-term experience in chemical industry, we offer the suitable precursors for your process/application.
JAC’s precursors are mainly used in these fields/areas
Coating
Coating technology is applied to various purposes, such as improvement in food packaging material, increase in corrosion resistance of steel (machinery parts, automobile parts etc.), improvement in stripping performance of mold and etc.
By coating on glass, metals and plastics, it will add new features and add higher value to the product.
It will also contribute to lower processing temperature, reducing coat thickness, superior adhesion, good uniformity etc.
Representative precursors
- Trimethylaluminum (TMA)
- Trimethylborane (B(CH3)3)
- Methyltrichlorosilane (CH3SiCl3) etc.
Semiconductor
Semiconductor has the property intermediate between “conductor” (conducts electricity easily) such as copper and aluminum and “insulator” (does not conduct electricity) such as rubber and glass.
In all metallic elements, only a few elements can be used as semiconductor such as silicone and germanium etc.
Especially, silicone is very stable as semiconductor material, and most of the semiconductor products are using silicon.
Representative precursors
- Tris(dimethylamino)aluminum (TDMAA)
- Bis(ethylcyclopentadienyl)Ruthenium (Ru(EtCp)2)
- BEMAS:Bis(ethylmethylamino)silane (BEMAS) etc.
Compound Semiconductor
Silicon semiconductors are made by one element (Si), but compound semiconductors are made by more than one element.
The typical combinations are “group III and V (GaAs, GaP, InP)”, “group II and VI (CdTe, ZnSe)”, and “group IV and IV (SIC)” in the periodic table.
The function of the compound semiconductor is determined by the combination type.
Compound semiconductor has better high-speed processing capability than silicone devices, and utilized in products widely used in daily living, such as cell phone, optical communication devices, white LED etc.
Representative precursors
- Bis-cyclopentadienylmagnesium (MgCp2)
- Tert-Butylamine (TBA) etc.
Secondary Cell
Secondary cell can be recharged and used repeatedly, and nickel-cadmium battery, nickel metal hydride battery, lithium-ion battery are well-known.
As lithium-ion battery is compact and high-output type, it is widely used in mobile devices such as cell phone and notebook computer, and car battery for hybrid vehicles.
Now its market is expanding.
The main materials for lithium ion battery are positive-electrode active material, negative-electrode active material, electrolysis solution, and separator.
JAC are providing Li compounds etc. used for positive-electrode active material.
Representative precursors
- Li(t-OBu) etc.
Solar Cell
Solar cells are generally categorized as “silicone-based”, “chemical compound-based” and “organic-based”.
Silicon solar cells are the most widely used in current solar power generation system.
JAC are providing precursors used for n-type P dispersion, n-type ZnO film and etc.
Representative precursors
- Phosphorus oxychloride (POCl3)
- Diethylzinc (DEZ) etc.