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シリコン酸化膜及び窒化膜低温成長用新規アミノシラン化合物（BEMAS）の作製と評価

Domestic Conference Posted on 2015年8月12日2015年9月30日

シリコン酸化膜及び窒化膜低温成長用新規アミノシラン化合物（BEMAS）の作製と評価

2008年春　応用物理学会、野津定央、安原重雄、遠藤和彦

 

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