Structure-Designable Formation-Method of Super Low-k SiOC Film (k=2.2) by Neutral-Beam-Enhanced-CVD, Interconnect Technology Conference, 2008. IITC 2008. International, Yasuhara, S. ; Institute of Fluid Science, Tohoku University ; Chung, Juhyun ; Tajima, K. ; Yano, H. more authors
